Range and Longitudinal Range Straggling With Various Stopping Power Formulations for Oxygen Ions in Si and SiO2

Abstract

The results on comparison of different energy-loss formulations as well as calculations of the range and range straggling have been presented for the ion-target system where oxygen ions are incident on amorphous silicon and silicon dioxide targets. Applying stopping-power expressions by Montenegro et al., Öztürk et al., Wang and He, and Gümüş and Köksal, we have numerically calculated range and range straggling within a transport-theory formalism. An interesting result is that the Montenegro et al. formula produces results better than its corrected version; the Öztürk et al. relation, despite the range and range straggling calculations indicating that the produced results by using the Öztürk et al. formulation are better than the Montenegro et al. formula when compared with experiment. The results with respect to the range straggling of oxygen ions in silicon dioxide show that the deviation from the experiment for the Öztürk et al. formulation is 42% at 200 keV, being the smallest deviation among the SRJM program and the other techniques. © 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.