Range and longitudinal range straggling with various stopping power formulations for oxygen ions in Si and SiO2

Abstract

The results on comparison of different energy-loss formulations as well as calculations of the range and range straggling have been presented for the ion-target system where oxygen ions are incident on amorphous silicon and silicon dioxide targets. Applying stopping-power expressions by Montenegro et al., Ozturk et al., Wang and He, and Gumus and Koksal, we have numerically calculated range and range straggling within a transport-theory formalism. An interesting result is that the Montenegro et al. formula produces results better than its corrected version; the Ozturk et al. relation, despite the range and range straggling calculations indicating that the produced results by using the Ozturk et al. formulation are better than the Montenegro et al. formula when compared with experiment. The results with respect to the range straggling of oxygen ions in silicon dioxide show that the deviation from the experiment for the Ozturk et al. formulation is 42% at 200 keV, being the smallest deviation among the SRIM program and the other techniques.